Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.56-56
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- 2002
X-ray scattering study of copper-filling profile in submicron trenches
- Kim, Sang-Soo (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
- Kang, Hyun-Chul (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
- Noh, Do-Young (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
- Yun, Jong-Min (Department of Materials Science and Engineering, Seoul National University) ;
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Joo, Young-Chang
(Department of Materials Science and Engineering, Seoul National University)
- Published : 2002.06.27
Abstract
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