한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.407-410
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- 2002
Si(100) 기판 위에 성장된 3C-SiC 박막의 열산화에 관한 연구
A Study on Thermal Oxidation of 3C-SiC Thin-films Grown on Si(100) Wafer
- Chung, Yun-Sik (Pukyong National Univ.) ;
- Ryu, Ji-Goo (Pukyong National Univ.) ;
- Chung, Su-Young (Dongseo Univ.) ;
- Chung, Gwiy-Sang (Dongseo Univ.)
- 발행 : 2002.11.07
초록
Thermal oxidations of 3C-SiC thin-films grown on Si(100) by APCVD(atmospheric pressure chemical vapor deposition) were carried out. The oxidations of 3C-SiC were performed at