Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
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- Pages.407-410
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- 2002
A Study on Thermal Oxidation of 3C-SiC Thin-films Grown on Si(100) Wafer
Si(100) 기판 위에 성장된 3C-SiC 박막의 열산화에 관한 연구
- Chung, Yun-Sik (Pukyong National Univ.) ;
- Ryu, Ji-Goo (Pukyong National Univ.) ;
- Chung, Su-Young (Dongseo Univ.) ;
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Chung, Gwiy-Sang
(Dongseo Univ.)
- Published : 2002.11.07
Abstract
Thermal oxidations of 3C-SiC thin-films grown on Si(100) by APCVD(atmospheric pressure chemical vapor deposition) were carried out. The oxidations of 3C-SiC were performed at