Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
- /
- Pages.264-267
- /
- 2002
Characteristics of Oxidation System for Superconductor Thin Film( II )
초전도 박막 제작을 위한 산화 시스템의 특성( II )
- An, I.S. (Dongshin Uni.) ;
- Park, Y.P. (Dongshin Uni.) ;
- Lim, J.K. (Dongshin Uni.) ;
-
Jang, K.U.
(KyungWon Coll.)
;
- Lee, H.K. (KCCI) ;
- Kim, G.Y. (KUT Univ.) ;
- Lee, J.U. (KIEEME)
- 안인순 (동신대학교) ;
- 박용필 (동신대학교) ;
- 임중관 (동신대학교) ;
-
장경욱
(경원전문대학)
;
- 이희갑 (대한상공회의소) ;
- 김귀열 (한국기술교육대학교) ;
- 이준웅 (한국전기전자재료학회)
- Published : 2002.11.07
Abstract
An ozone condensation system is evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone is condensed by the adsorption method and its concentration is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the concentration evaluation from dilution to highly condensed ozone. The highest ozone concentration condensed by the adsorption method is evaluated to be 97 mol%