한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.252-255
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- 2002
BSCCO 박막의 부착계수 해석
Analysis of Sticking Coefficient in BSCCO Thin Film
- Chun, Min-Woo (Dept. of Electrical & Electronic Eng., Dongshin University) ;
- Park, Yong-Pil (Dept. of Electrical & Electronic Eng., Dongshin University)
- 발행 : 2002.11.07
초록
BSCCO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about