한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.27-30
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- 2002
Rhombohedral - Boron Phosphide 의 저온 증착과 물성분석
The Deposition of Rhombohedral - Boron Phosphide at Low Temperature and its Analysis of Physical Properties
- Hong, Kuen-Kee (University of Seoul) ;
- Yun, Yo-Chul ;
- Bok, Eun-Kyung ;
- Kim, Chul-Ju (University of Seoul)
- 발행 : 2002.11.07
초록
Boron Phosphide films were deposited on the glass substrate at the low temperature,