한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

a-C:H 박막의 물성 변화에 따른 액정 배향 특성에 관한 연구

A study on liquid crystal alignment characteristics by the properties of hydrogenated amorphous carbon thin films

  • 이대규 (연세대학교 금속공학과) ;
  • 노순준 (연세대학교 금속공학과) ;
  • 백홍구 (연세대학교 금속공학과) ;
  • 황정연 (연세대학교 전기전자공학과) ;
  • 조용민 (연세대학교 전기전자공학과) ;
  • 서대식 (연세대학교 전기전자공학과)
  • 발행 : 2002.07.08
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초록

This letter focuses on the liquid crystal alignment characteristics according to the properties of hydrogenated amorphous carbon(a-C:H) thin film deposited by RPECVD(Remote Plasma Enhanced Chemical Vapor Deposition) method using $C_2H_2$ and He gases. The properties of the deposited thin films were controlled by the ion beam irradiation time and ion beam energy. The results show that not ion beam energy but ion beam irradiation time plays an important role in the properties of a-G:H thin films. As the ion beam irradiation time increases, not only the sp2 concentration in a-G:H thin films but also liquid crystal pretilt angle was varied.

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