Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07b
- /
- Pages.839-844
- /
- 2002
A study on liquid crystal alignment characteristics by the properties of hydrogenated amorphous carbon thin films
a-C:H 박막의 물성 변화에 따른 액정 배향 특성에 관한 연구
Abstract
This letter focuses on the liquid crystal alignment characteristics according to the properties of hydrogenated amorphous carbon(a-C:H) thin film deposited by RPECVD(Remote Plasma Enhanced Chemical Vapor Deposition) method using