Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Sr modified $PbTiO_3$ thin films for tunable microwave device application

MOD법에 의한 Sr modified $PbTiO_3$ 박막 제조 및 Tunable microwave device 응용 특성 연구

  • 강동헌 (수원대학교 전자재료공학과) ;
  • 조수철 (수원대학교 전자재료공학과) ;
  • 차훈주 (수원대학교 전자재료공학과) ;
  • 조봉희 (수원대학교 전기공학과)
  • Published : 2002.07.08
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Abstract

$(Pb_{1-x}Sr_x)TiO_3$ $(0.6{\leq}x{\leq}0.8)$ thin films were prepared by the MOD method for tunable microwave device application and their characteristics were investigated as a function of Sr content(x) and applied field. Thin films showed a homogeneous microstructure and the tetragonality(c/a) was slightly decreased with increasing Sr content. With increasing Sr content, Curie temperature of the thin films showed a decreasing tendency. For the PST thin films, the dielectric constant at room temperature, Tc, and $tan{\delta}$ were 750~1900, $-70^{\circ}{\sim}-30^{\circ}C$ and 0.025~0.04, respectively.

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