한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

3차원 매립형 수동소자에 대한 통계적 분석

Statistical Analysis of Three-dimensional Embedded Passive Devices

  • 신동욱 (연세대학교 공과대학 전기전자공학과) ;
  • 오창훈 (연세대학교 공과대학 전기전자공학과) ;
  • 이규북 (전자부품연구원 무선회로연구센터) ;
  • 김종규 (전자부품연구원 무선회로연구센터) ;
  • 윤일구 (연세대학교 공과대학 전기전자공학과)
  • 발행 : 2002.07.08
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초록

In this paper, the effect of device model parameter variation on three-dimensional embedded passive devices was investigated using statistical analysis. The optimized equivalent circuit models for several different structures were obtained from HSPICE simulation. The mean and the standard deviation of model parameters were extracted and the sensitivity analysis for each component was performed. From the analysis, the performance and parametric yield of the devices can be analyzed.

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