Dynamics of a Micro Three-Axis Ring Gyroscope

마이크로 3축 링 자이로스코프의 동역학

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.