한국정보디스플레이학회:학술대회논문집
- 2002.08a
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- Pages.159-162
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- 2002
X-X: Single-Crystalline Si TFTs Fabricated with ${\mu}-Czochralski$ (grain-filter) process
- Ishihara, R. (DIMES-ECTM, Delft Univ. of Technol.) ;
- Dijk, B.D.van (DIMES-ECTM, Delft Univ. of Technol.) ;
- Wilt, P.Ch. van der (DIMES-ECTM, Delft Univ. of Technol.) ;
- Metselaar, J.W. (DIMES-ECTM, Delft Univ. of Technol.) ;
- Beenakker, C.I.M. (DIMES-ECTM, Delft Univ. of Technol.)
- Published : 2002.08.21
Abstract
This paper reviews an advanced excimer-laser crystallization technique enabling precise location-control of the individual grains. With the developed
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