A Fundamental Study of Compressible Micro Flows

압축성 마이크로 유동에 관한 기초 연구

Recently the micro flows have been received much attention in the applications with regard to Micro Electro Mechanical Systems(MEMS). Such flows are governed by relatively large viscous forces, compared with inetia force, and frequently specified by slip wall boundary conditions. In the present study, computations are applied to investigate the compressible viscous flows through an extremely small channel, and theoretical analyses are conducted using the Fanno flow theory. The axisymmetic, compressible, Wavier-Stokes equations are numerically solved by a fully implicit finite implicit method. The predicted results are validated with previous experimental data available. The results obtained show that for small Reynolds numbers, the viscous frictional force significantly influences the compressible micro channel flows.