Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.06a
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- Pages.72-74
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- 2002
The Study of erosion characteristics for MgO layer in plasma display panel
플라즈마 디스플레이 패널의 MgO막 부식 특성에 관한 연구
- Shin, Jae-Hwa (Incheon City College) ;
- Jeong, Dong-Hyo (Incheon City College)
- Published : 2002.06.30
Abstract
In this paper, we showed the erosion characteristics of MgO protector layer releated to lifetime of plasma display panel(PDP). We observed MgO erosion characteristic as a functions of deposition conditions. In RIE condition of Xe gas, the lowest erosion rate appears in the conditions of no heating, bias voltage -30V and pressure 5mtorr. In general. as deposition rate increases, erosion rate decreases.
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