대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 합동 추계학술대회 논문집 정보 및 제어부문
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- Pages.110-113
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- 2002
트랙장비용 쿨 플레이트를 이용한 웨이퍼 온도제어 시스템 설계
Design of temperature control system using cool-plate of track equipment
초록
This paper propose a method for the temperature control using cool-plate in the track equipment. The employed control algorithm is PID control algorithm. The control gains are found using relay auto-tuning algorithm. After that the gains are adjusted manually in trial and error. The control hardware circuit is designed and implemented in the lab. The controlled temperature reached the desired value Within
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