한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
- /
- Pages.94-96
- /
- 2002
Vibration Reduction of Spin Etcher
- Rim, Kyung-Hwa (Dept. of Control System Engineering, Korea University of Technology and Education) ;
- Lww, Eun-Kyung (Dept. of Control System Engineering, Korea University of Technology and Education) ;
- Cho, Jung-Keun (DNS Korea)
- 발행 : 2002.11.01