Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.91-91
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- 2002
Deposition and characterization of Ru films deposited using $Ru(EtCp)_2$ and thermal decomposition of $Ru(EtCp)_2$
$Ru(EtCp)_2$ precursor를 이용하여 증착한 Ru 박막 특성 및 Ru precursor의 분해 특성 분석
Abstract
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