Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.88-88
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- 2002
Thermal decomposition and desorption study of dimethylaminoethanol on Si(100) by TPD and AES
TPD, AES를 이용한 Si(100)에서 dmaeH(dimethylaminoethanol)의 분해특성연구
Abstract
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