Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.74-74
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- 2002
ALCVD of Zr Silicate Films Using Chloride/Alkoxide Compounds
Chloride 화합물과 Alkoxide 화합물을 이용한 Zr Silicate 박막의 원자층 화학증착
Abstract
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