Development of $0.12\mu\textrm{m}$ Low Power SRAM with Advanced Disposable Spacer Scheme for Low Vcc Operation

Advanced Disposable Spacer를 이용한 Low Vcc Operation용 $0.12\mu\textrm{m}$ 저전력 SRAM 공정개발에 관한 연구

  • Published : 2002.11.01