한국정보통신학회:학술대회논문집 (Proceedings of the Korean Institute of Information and Commucation Sciences Conference)

한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
권호 표지

동시 스퍼터법으로 제작한 Bi 초전도 박막의 성장 모델

Growth Model of Bi-Superconducting Thin Film Fabricated by Co-sputtering Method

  • Chun, Min-Woo (Dept. of Electrical, Electric, Info. & Commun. Eng., Dongshin Univ.) ;
  • Park, Yong-Pil (Dept. of Electrical, Electric, Info. & Commun. Eng., Dongshin Univ.)
  • 발행 : 2002.11.01
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초록

BSCCO thin films are fabricated via a co-deposition process at an ultra-low growth rate using ion beam sputtering. The sticking coefficient of Bi element exhibits a characteristic temperature dependence. This temperature dependence of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi$_2$O$_3$.

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