Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Growth Model of Bi-Superconducting Thin Film Fabricated by Co-sputtering Method

동시 스퍼터법으로 제작한 Bi 초전도 박막의 성장 모델

  • Chun, Min-Woo (Dept. of Electrical, Electric, Info. & Commun. Eng., Dongshin Univ.) ;
  • Park, Yong-Pil (Dept. of Electrical, Electric, Info. & Commun. Eng., Dongshin Univ.)
  • Published : 2002.11.01
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Abstract

BSCCO thin films are fabricated via a co-deposition process at an ultra-low growth rate using ion beam sputtering. The sticking coefficient of Bi element exhibits a characteristic temperature dependence. This temperature dependence of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi$_2$O$_3$.

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