Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2002.06b
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- Pages.77-80
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- 2002
Wet etching charicteristics of InP in InP/InGaAs HBTs and their fabrication
InP의 습식식각특성과 InP/lnGaAs HBT의 제작
Abstract
In this paper, InP-based HBTs have been optimally designed by numerical simulation and fabricated by the self-aligned process. The structure of HBT was designed in terms of the current gain*f
Keywords