Studies on the fabrication of transmission line with high and low $Z_0$ using BCB layer

BCB를 이용한 High & Low$Z_0$전송선로 제작에 대한 연구

  • 한효종 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 이성대 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 전영훈 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 윤관기 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 김삼동 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 황인석 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 이진구 (동국대학교 밀리미터파 신기술 연구센터) ;
  • 류기현 (LG 전자기술원)
  • Published : 2002.06.01

Abstract

In this paper, transmission lines with low and high characteristic impedance (Z$_{0}$) are fabricated and analyzed. The transmission lines are fabricated on the benzo-cyclo-butene (BCB) films of a low dielectric constant. For the low Z$_{0}$, two types of coplanar waveguide (CPW) structures are fabricated, which include bottom-ground and double-ground type. Measurement shows that Z$_{0}$ values for each CPW type are 7.3 and 9.4$\Omega$, respectively, at a signal line width of 100 #m. Whit the ratio between the spacing of bottom-ground and the signal line with becomes greater than 2.5, the Z$_{0}$ is nearly saturated. In addition, thin film microstrip lines fabricated using the BCB insertion layers show very low Z$_{0}$ of 25.5$\Omega$, and this impedance is ~64 % of the values obtained from the BCB-based CPW structures of the same line width. Measurement result of CPW on BCB layer is 100.5 Ω.s 100.5 Ω.

Keywords