Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2002.06a
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- Pages.423-426
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- 2002
Characteristics analysis and fabrication of SAW filter for micro-wave using Undoped-GaN thin film
Undoped-GaN 압전 박막을 이용한 RF용 SAW 필터의 제조 및 특성분석
Abstract
Undoped-GaN thin film is deposited on Sapphire substrate by MOCVD. SAW velocity is measured with tile center frequency by HP8753C. Center frequency is 266.52 MHz and SAW velocity is 5330㎧ when wavelength was 20 Um. insertion loss, Q factor and side love attenuation is 41.265 dB, 257.41 and over 23 dB. k'i is calculated from tile measured data. k2'is from 1 % to 4 %. TCF is -61.817pp/m/
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