Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
- /
- Pages.128-128
- /
- 2002
Effects of interfacial layers between $ZrO_2$ and Si on capacitor characteristics for alternative gate dielectric application
$ZrO_2$ 와 Si의 계면층 조작에 따른 게이트용 캐퍼시터 특성 연구
Abstract
Keywords