A Study on Critical Cutting Depth in Micro-Machining

마이크로 가공에서의 한계절삭깊이에 관한 연구

In micro-machining, diamond tool is commonly used because it brings much better micro-machinability due to its edge sharpness. However, it is a big question even how thinly the sharp edge of a diamond tool can cut a ship from the workpiece surface. This paper is to investigate the critical cutting depth, at which the dominant cutting mode changes from chip formation to burnishing or vice versa, for a given edge radius. The theoretically critical cutting depth is 0.25$\mu\textrm{m}$(0.8$\mu\textrm{m}$) in cutting using a square type(V-type) diamond tool that has edge radius of 1$\mu\textrm{m}$(1.5$\mu\textrm{m}$). Experimentally, the dominant cutting mode changes and cutting surface becomes better at critical cutting depth. To get high quality surface, depth of cut must be critical cutting depth because less plastically deformed substrate is left on the surface.