한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2002년도 춘계학술대회 논문집
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- Pages.342-347
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- 2002
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- 2005-8446(pISSN)
초정밀 평면 X-Y 스테이지의 최적제어기 설계
Optimal Design of Controller for Ultra-Precision Plane X-Y Stage
- Kwak, L. K. (Graduate School, CSU) ;
- kim, J. Y. (Mechanical Eng. Dept., CSU) ;
- Yang, D. J. (Graduate School, CSU) ;
- Ko, M. S. (Graduate School, CSU) ;
- You, S. (MSC) ;
- Kim, K. T. (Hwacheon Mashine Tool)
- 발행 : 2002.05.01
초록
After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE
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