Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.07c
- /
- Pages.1969-1971
- /
- 2002
Low Pull-in Voltage MEMS Switches for Wireless Applications
저전압구동 무선통신용 MEMS 스위치
- Shim, Dong-Ha (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Lee, Moon-Chul (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Lee, Eun-Sung (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Park, Sun-Hee (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Kim, Young-Il (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Song, In-Sang (MEMS Lab., Samsung Advanced Institute of Technology)
- 심동하 (삼성종합기술원 MEMS Lab.) ;
- 이문철 (삼성종합기술원 MEMS Lab.) ;
- 이은성 (삼성종합기술원 MEMS Lab.) ;
- 박선희 (삼성종합기술원 MEMS Lab.) ;
- 김영일 (삼성종합기술원 MEMS Lab.) ;
- 송인상 (삼성종합기술원 MEMS Lab.)
- Published : 2002.07.10
Abstract
This paper presents the design and performance of low pull-in voltage MEMS switches for commercial cellular/PCS applications. The switches have all-metal (3
Keywords