Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Global Simulation for $CF_4$ Discharge in Transformer Coupled Plasma Source

평판형 유도결합 플라즈마 장치의 $CF_4$ 방전에 대한 Global Simulation

  • Published : 2002.07.10
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Abstract

Global simulator for $CF_4$ discharge in transformer coupled plasma (TCP) source is developed and simulations arc performed under various conditions. The developed simulator is based on a set of space averaged fluid equations for electrons, positive ions, neutrals and radicals of $CF_4$ plasma. And the used absorbed power by electrons is calculated by a 2-dimensional heating model[1].

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