Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.07c
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- Pages.1757-1759
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- 2002
Global Simulation for $CF_4$ Discharge in Transformer Coupled Plasma Source
평판형 유도결합 플라즈마 장치의 $CF_4$ 방전에 대한 Global Simulation
- Kwon, Deuk-Chul (Chungbuk National University) ;
- Yoo, D.H. (Chungbuk National University) ;
- Kim, S.S. (Korea Basic Science Institute) ;
- Yoon, N.S. (Chungbuk National University) ;
- Kim, J.H. (Korea Research Institute of Standards and Science) ;
- Shin, Y.H. (Korea Research Institute of Standards and Science)
- Published : 2002.07.10
Abstract
Global simulator for
Keywords