An equivalent Circuit Model of Transformer Coupled Plasma Source

축전 용량이 고려된 평판형 유도 결합 플라즈마 원의 등가회로 모델

In this work we develop an equivalent circuit model of TCP(transformer coupled plasma) source and investigate matching characteristic. The developed circuit model includes transmission line, standard-type impedance matching network and displacement current in the plasma source. The impedance of TCP is calculated by previously developed program for various source parameters and dependance of components of matching impedance on the value of source impedance is investigated.