대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.1596-1598
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- 2002
고온용 박막형 스트레인 게이지 개발
Development of Thin-Film Type Strain Gauges for High-Temperature Applications
- Choi, Sung-Kyu (School of Information System Eng, Dongseo University) ;
- Chung, Gwiy-Sang (School of Information System Eng, Dongseo University)
- 발행 : 2002.07.10
초록
This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(
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