대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.1593-1595
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- 2002
Si(100)기판상에 3C-SiC결정성장
Crystal growth of 3C-SiC on Si(100) Wafers
- Chung, Yun-Sik (Dongseo University) ;
- Chung, Gwiy-Sang (Dongseo University) ;
- Nishino, Shigehiro (Kyoto Institute of Technology)
- 발행 : 2002.07.10
초록
Single crystal 3C-SiC(cubic silicon carbide) thin-films were deposited on Si(100) wafers up to a thickness of 4.3
키워드