대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.1479-1481
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- 2002
다양한 증착변수에 따른 AlN 박막의 물성 및 SAW 소자의 특성 분석
Effects of deposition conditions on properties of AlN thin films and characterization of AlN SAW devices
- Jung, Jun-Phil (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University) ;
- Lee, Myung-Ho (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University) ;
- Lee, Jin-Bock (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electronic, Electrical, Control, and Instrumentation Engineering, Hanyang University)
- Published : 2002.07.10
Abstract
AlN thin films were deposited on Si(100) and
Keywords