대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 D
- /
- Pages.2089-2092
- /
- 2002
긴 시간지연을 갖는 단결정 실리콘 성장기(Crystal Grower - FF CZ150)의 자동 직경 제어 시스템
Automatic Diameter Control System with Long Time-Delay for Crystal Grower (FF - CZ150)
- Park, Jong-Sik (Dept. Information & Control Eng., Hoseo Univ.) ;
- Kim, Jong-Hun (Dept. Information & Control Eng., Hoseo Univ.) ;
- Yang, Seung-Hyun (Dept. Information & Control Eng., Hoseo Univ.) ;
- Lee, Suk-Won (Dept. Information & Control Eng., Hoseo Univ.)
- 발행 : 2002.07.10
초록
The PID controller have the simple structure and show the comparatively good control performance. Crystal Grower(FF-CZ150) melt polycrystalline silicon at the temperature of about 1450
키워드