Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Automatic Diameter Control System with Long Time-Delay for Crystal Grower (FF - CZ150)

긴 시간지연을 갖는 단결정 실리콘 성장기(Crystal Grower - FF CZ150)의 자동 직경 제어 시스템

  • 박종식 (호서대학교 정보제어공학과) ;
  • 김종훈 (호서대학교 정보제어공학과) ;
  • 양승현 (호서대학교 정보제어공학과) ;
  • 이석원 (호서대학교 정보제어공학과)
  • Published : 2002.07.10
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Abstract

The PID controller have the simple structure and show the comparatively good control performance. Crystal Grower(FF-CZ150) melt polycrystalline silicon at the temperature of about 1450$^{\circ}C$, then grow it into a single crystalline ingot. The automatic diameter control system of the Crystal Grower has a good performance with only PD control. But it contain the integrator in the plant which has a long time delay. In this paper, we show the secondary approximate model and applies time delay controller which has good performance for the plant with long time delay. It will be able to improve the response characteristic against a standard input and a load disturbance.

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