Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.65-66
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- 2001
Influence of surface energy on the microstructure evolution of AlN films synthesized by D.C magnetron sputtering
- Chung, Y.M. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university) ;
- Min, M.J. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university) ;
- Kim, Y.M. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university) ;
- Han, J.G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university)
- Published : 2001.02.22
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