Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.52-52
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- 2001
후속 열처리에 따른 $W/WN_{x}/poly$ $Sil_{-x}Ge_{x}$ 의 계면 반응 및 $W/WN_{x}/poly$ $Sil_{-x}Ge_{x}$ MOS Capacitor구조의 전기적 특성 분석
- Gang, Seong-Gwan (Yonsei Univ, Dept of Ceramic Eng.) ;
- Kim, Jae-Jin (Yonsei Univ, Dept of Ceramic Eng.) ;
- Go, Dae-Hong (Yonsei Univ, Dept of Ceramic Eng.) ;
- Gang, Han-Byeol (Sung kyun kwan univ. School of metallurgical and materials eng.) ;
- Yang, Cheol-Ung (Sung kyun kwan univ. School of metallurgical and materials eng.) ;
- An, Tae-Hang (Hyundai Electronics Industries Co. Ltd.) ;
- Yeo, In-Seok (Hyundai Electronics Industries Co. Ltd.) ;
- Lee, Tae-Wan (Ju-sung Co. Ltd.) ;
- Lee, Yeong-Ho (Ju-sung Co. Ltd.)
- Published : 2001.02.22
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