한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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- Pages.54-56
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- 2001
$SiH_4$ Soak Effects for Optimization of Tungsten Plug Deposition on TiN Barrier Metal
- Kim, Sang-Yang ;
- Seo, Yong-Jin ;
- Lee, Woo-Sun ;
- Chung, Hun-Sang ;
- Kim, Chang-Il ;
- Chang, Eui-Goo ;
- Chung, Yong-Ho
- 발행 : 2001.05.11
초록
The