Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.05b
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- Pages.54-56
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- 2001
$SiH_4$ Soak Effects for Optimization of Tungsten Plug Deposition on TiN Barrier Metal
- Kim, Sang-Yang ;
- Seo, Yong-Jin ;
- Lee, Woo-Sun ;
- Chung, Hun-Sang ;
- Kim, Chang-Il ;
- Chang, Eui-Goo ;
- Chung, Yong-Ho
- Published : 2001.05.11
Abstract
The