대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
- /
- Pages.168-170
- /
- 2001
NiCr 박막 저항계의 열적 안정성에 관한 연구
The Study on Thermal Stability of NiCr Thin-films Resistor
- Kim, I.S. (KERI Electric & Magnetic Devices Research Group) ;
- Jeong, S.J. (KERI Electric & Magnetic Devices Research Group) ;
- Kim, D.H. (KERI Electric & Magnetic Devices Research Group) ;
- Song, J.S. (KERI Electric & Magnetic Devices Research Group)
- 발행 : 2001.11.03
초록
The NiCr is an important material for present thin-film resistor application owing to its low TCR and thermal stability. In this work, the NiCr thin films were deposited on corning glass substrate by reactive magnetron sputtering and the annealing at temperatures range from 300 to
키워드