한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
- /
- Pages.256-259
- /
- 2001
회전보상기를 이용한 분광타원기술에 있어서의 캘리브레이션
Calibrations in rotating compensator spectroscopic ellipsometry
초록
Rotating-compensator type ellipsometer was developed for spectroscopic measurements. For accurate data reduction, the azimuths of transmission axises of polarizer and analyzer, and the angular position of the fast axis of compensator should be determined through calibration process. In this paper, we present various calibration methods.
키워드