한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2001년도 춘계학술발표회 초록집
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- Pages.56-57
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- 2001
그리드 전압을 이용한 유도결합 플라즈마에서 전자 온도 및 이온 비율 제어
Control of electron temperature and ion ratios in inductively coupled plasma using grid bias voltage.
- Bai, K.H. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Hong, J.I. (Samsung electronics) ;
- Ryu, S.J. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Chang, H.Y. (Department of Physics, Korea Advanced Institute of Science and Technology)
- 발행 : 2001.06.01