그리드 전압을 이용한 유도결합 플라즈마에서 전자 온도 및 이온 비율 제어

Control of electron temperature and ion ratios in inductively coupled plasma using grid bias voltage.

  • Bai, K.H. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Hong, J.I. (Samsung electronics) ;
  • Ryu, S.J. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Chang, H.Y. (Department of Physics, Korea Advanced Institute of Science and Technology)
  • 발행 : 2001.06.01