Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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광식각 기술을 이용한 미세라인의 형성 및 Series Resonator의 구현

  • 박성대 (전자부품 연구원 고주파재료연구센터) ;
  • 조현민 (전자부품 연구원 고주파재료연구센터) ;
  • 이영신 (전자부품 연구원 고주파재료연구센터) ;
  • 이우성 (전자부품 연구원 고주파재료연구센터) ;
  • 박종철 (전자부품 연구원 고주파재료연구센터)
  • Published : 2001.07.01
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Abstract

Using the photoimageable thick film conductors, $25\mu\textrm{m}$ line widths and $25\mu\textrm{m}$ spaces can be obtained. Test patterns are made by green tape lamination, paste printing, exposing to UV light, developing in an aqueous process and cofiring. Postfiring method using alumina substrate can be also applied to fine line formation. Series gap resonator formed by photopatterning process showed the improved signal transmission characteristics compared to that obtained by conventional screen printing.

Keywords