Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)

2001.07a
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Pages.146-150
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2001

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)

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Nanotribological Characterization of Fluorocarbon Thin Film by Plasma Enhanced CVD

Kim, Tae-Gon (Metallurgy and Materials Engineering, Hanyang Univ.) ;
Lee, Su-Youn (Metallurgy and Materials Engineering, Hanyang Univ.) ;
Park, Jin-Goo (Metallurgy and Materials Engineering, Hanyang Univ.) ;
Shin, Hyung-Jae (Core Technology Research Center, Samsung electronics Co. Ltd.)

Published : 2001.07.01

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