Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.05a
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- Pages.79-79
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- 2001
Fabrication of X-ray reflective Mo/Si Multilayer Mirrors by Multi-Target Sputtering
Multi-Target Sputtering을 이용한 Mo/Si X-ray 반사형 다층박막 증착에 관한 연구
Abstract
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