한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 추계학술대회 논문집
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- Pages.300-303
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- 2001
공증착법으로 제작한 BSCCO 초전도 박막의 부착계수 해석
Analysis of Sticking Coefficient in BSCCO Superconductor Thin Film Fabricated by Co-deposition
초록
BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below 730