한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 추계학술대회 논문집
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- Pages.390-393
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- 2001
붕규산염 유리를 절연층으로 도포한 정전척의 제조
Fabrication of Electrostatic Chucks Using Borosilicate Glass Coating as an Insulating Layer
초록
This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from 100