Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.07a
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- Pages.1022-1025
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- 2001
Fabrication of Tantalum Nitride Thin-Film as High-temperature Strain Gauges
고온 스트레인 게이지용 질화탄탈박막의 제작
Abstract
This paper presents the characteristics of TaN thin-film as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4∼20%)N
Keywords
- Strain gauge;
- TaN thin film;
- TCR(Temperature Coefficient of Resistance);
- Gauge factor;
- Non-linearity