A New SOl LIGBT Structure with Improved Latch-Up Performance

  • Sung, Woong-Je (Korea Univ. Department of electrical engineering Semiconductor and CAD Lab) ;
  • Lee, Yong-11 (Korea Univ. Department of electrical engineering Semiconductor and CAD Lab) ;
  • Park, Woo-Beom (Korea Univ. Department of electrical engineering Semiconductor and CAD Lab) ;
  • Sung, Man-Young (Korea Univ. Department of electrical engineering Semiconductor and CAD Lab)
  • Published : 2001.07.01

Abstract

In this paper, a new lateral insulated gate bipolar transistor (LIGBT) is proposed to improve the latch-up performance without current path underneath the n+ cathode region. The improvement of latch-up performance is verified using the two-dimensional simulator MEDICI and the simulation results on the latch-up current density are 3.12${\times}$10$\^$-4/ A/$\mu\textrm{m}$ for the proposed LIGBT and 0.94${\times}$10$\^$-4/ A/$\mu\textrm{m}$ for the conventional LIGBT. The proposed SOI LIGBT exhibits 3 times larger latch-up capability than the conventional SOI LIGBT.

Keywords